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Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

By: Contributor(s): Material type: TextTextPublication details: [Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience, c2006.Description: xix, 463 p. : ill. ; 25 cmISBN:
  • 9780471784067
  • 0471784060
Subject(s): DDC classification:
  • 621.38152   22
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Main library General Stacks 621.38152 / MA.F 2006 (Browse shelf(Opens below)) 1 Available 000582

Includes bibliographical references and index.

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