Fundamentals of semiconductor manufacturing and process control /
May, Gary S.
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006. - xix, 463 p. : ill. ; 25 cm.
Includes bibliographical references and index.
9780471784067 0471784060
2005028448
Electronics.
Integrated circuits -- Design and construction.
Process control -- Statistical methods.
Semiconductors -- Design and construction.
621.38152
Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - [Piscataway] : Hoboken, N.J. : IEEE ; Wiley-Interscience, c2006. - xix, 463 p. : ill. ; 25 cm.
Includes bibliographical references and index.
9780471784067 0471784060
2005028448
Electronics.
Integrated circuits -- Design and construction.
Process control -- Statistical methods.
Semiconductors -- Design and construction.
621.38152