Fundamentals of semiconductor manufacturing and process control / (Record no. 1716)

MARC details
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 080323s2006 njua b 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2005028448
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9780471784067
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 0471784060
035 ## - SYSTEM CONTROL NUMBER
System control number (Sirsi) u259
040 ## - CATALOGING SOURCE
Original cataloging agency EG-CaNU
Transcribing agency EG-CaNU
Modifying agency EG-CaNU
042 ## - AUTHENTICATION CODE
Authentication code ncode
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name May, Gary S.
9 (RLIN) 4907
245 10 - TITLE STATEMENT
Title Fundamentals of semiconductor manufacturing and process control /
Statement of responsibility, etc. Gary S. May, Costas J. Spanos.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. [Piscataway] :
Name of publisher, distributor, etc. IEEE ;
Place of publication, distribution, etc. Hoboken, N.J. :
Name of publisher, distributor, etc. Wiley-Interscience,
Date of publication, distribution, etc. c2006.
300 ## - PHYSICAL DESCRIPTION
Extent xix, 463 p. :
Other physical details ill. ;
Dimensions 25 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
596 ## -
-- 1
630 00 - SUBJECT ADDED ENTRY--UNIFORM TITLE
Uniform title Electronics.
9 (RLIN) 4908
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
General subdivision Design and construction.
9 (RLIN) 4909
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Process control
General subdivision Statistical methods.
9 (RLIN) 213
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semiconductors
General subdivision Design and construction.
9 (RLIN) 4910
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Spanos, Costas J.
9 (RLIN) 4911
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Total Checkouts Full call number Barcode Date last seen Copy number Price effective from Koha item type
    Dewey Decimal Classification     Main library Main library General Stacks 01/26/2020 AHRA-P   621.38152 / MA.F 2006 000582 11/24/2019 1 11/24/2019 Books