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Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg.

By: Contributor(s): Material type: TextTextSeries: McGraw-Hill chemical engineering seriesPublication details: New York : McGraw-Hill, c1993.Description: xvii, 774 p. : ill. ; 25 cmISBN:
  • 0070418535
Subject(s): DDC classification:
  • 621.38152   20
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Main library General Stacks 621.38152 / MI.P 1993 (Browse shelf(Opens below)) 1 Available 003386

Includes bibliographical references and index.

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