Process engineering analysis in semiconductor device fabrication / Stanley Middleman, Arthur K. Hochberg.
Material type: TextSeries: McGraw-Hill chemical engineering seriesPublication details: New York : McGraw-Hill, c1993.Description: xvii, 774 p. : ill. ; 25 cmISBN:- 0070418535
- 621.38152 20
Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|
Books | Main library General Stacks | 621.38152 / MI.P 1993 (Browse shelf(Opens below)) | 1 | Available | 003386 |
Includes bibliographical references and index.
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