000 00788nam a22002537a 4500
008 211228b2015 |||a|||f mb|| 00| 0 eng d
040 _aEG-CaNU
_cEG-CaNU
041 0 _aeng
_beng
082 _a621
100 0 _aAhmed Wasim Ibrahim Elsaid
_9999
245 1 _aDUV and EUV Photo-Lithography Solutions For The 7nm Technology/
_cAhmed Wasim Ibrahim Elsaid
260 _c2015
300 _a p.
_bill.
_c21 cm.
500 _3Supervisor: Rafik Guindi
502 _aThesis (M.A.)—Nile University, Egypt, 2015 .
504 _a"Includes bibliographical references"
505 0 _aContents:
520 3 _aAbstract:
546 _aText in English, abstracts in English.
650 4 _aMSD
_9317
655 7 _2NULIB
_aDissertation, Academic
_9187
690 _aMSD
_9317
942 _2ddc
_cTH
999 _c9218
_d9218