| 000 | 00876cam a22002534a 4500 | ||
|---|---|---|---|
| 008 | 081102s1999 enka b 001 0 eng | ||
| 010 | _a98036213 | ||
| 020 | _a9780471942047 | ||
| 035 | _a(Sirsi) u959 | ||
| 040 |
_aEG-CaNU _cEG-CaNU _dEG-CaNU |
||
| 042 | _ancode | ||
| 082 | 0 | 0 |
_a620.8 _2 21 |
| 245 | 0 | 0 |
_aCleanroom design / _c edited by W. Whyte. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester, West Sussex, England ; _a New York : _b Wiley, _c 1999. |
||
| 300 |
_axii, 305 p. : _b ill. ; _c 26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 630 | 0 | 0 |
_aElectronics. _917223 |
| 650 | 0 |
_aClean rooms. _917225 |
|
| 700 | 1 |
_aWhyte, W. _917227 |
|
| 596 | _a1 | ||
| 999 |
_c8526 _d8526 |
||