000 00876cam a22002534a 4500
008 081102s1999 enka b 001 0 eng
010 _a98036213
020 _a9780471942047
035 _a(Sirsi) u959
040 _aEG-CaNU
_cEG-CaNU
_dEG-CaNU
042 _ancode
082 0 0 _a620.8
_2 21
245 0 0 _aCleanroom design /
_c edited by W. Whyte.
250 _a2nd ed.
260 _aChichester, West Sussex, England ;
_a New York :
_b Wiley,
_c 1999.
300 _axii, 305 p. :
_b ill. ;
_c 26 cm.
504 _aIncludes bibliographical references and index.
630 0 0 _aElectronics.
_917223
650 0 _aClean rooms.
_917225
700 1 _aWhyte, W.
_917227
596 _a1
999 _c8526
_d8526