| 000 | 01155cam a2200241 a 4500 | ||
|---|---|---|---|
| 008 | 120701s2010 maua 001 0 eng | ||
| 020 | _a9781607839774 | ||
| 020 | _a1607839776 | ||
| 035 | _a(Sirsi) u8318 | ||
| 040 |
_aEG-CaNU _c EG-CaNU _d EG-CaNU |
||
| 042 | _ancode | ||
| 082 | 0 | 4 |
_a621.381 _2 22 |
| 100 | 1 |
_aCampanella, Humberto. _915307 |
|
| 245 | 1 | 0 |
_aAcoustic wave and electromechanical resonators : _b concept to key applications / _c Humberto Campanella. |
| 246 | 3 | _aAcoustic wave & electromechanical resonators | |
| 260 |
_aNorwood, MA. : _b Artech House, _c c2010. |
||
| 300 |
_axv, 345 p. : _b ill. ; _c 26 cm. |
||
| 500 | _aIncludes index. | ||
| 505 | 0 | _a1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. | |
| 650 | 0 |
_aAcoustic surface wave devices. _93737 |
|
| 650 | 0 |
_aElectric resonators. _915308 |
|
| 596 | _a1 | ||
| 999 |
_c7218 _d7218 |
||