| 000 | 00697cam a22001934a 4500 | ||
|---|---|---|---|
| 008 | 100309s 000 0 eng | ||
| 010 | _a 2009417108 | ||
| 020 | _a 9783527320349 (set) | ||
| 020 | _a 3527320342 (set) | ||
| 035 | _a(Sirsi) u4624 | ||
| 082 | 0 | 4 |
_a 621.3815 _2 22 |
| 245 | 0 | 0 |
_a Handbook of 3D integration : _b technology and applications of 3D integrated circuits / _c edited by Philip Garrou, Christopher Bower and Peter Ramm. |
| 700 | 1 |
_a Garrou, Philip E. _99236 |
|
| 596 | _a1 | ||
| 650 | 0 |
_aIntegrated circuits. _99237 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _99238 |
|
| 650 | 0 |
_aSemiconductor wafers. _99239 |
|
| 650 | 0 |
_aThree-dimensional imaging _91189 |
|
| 999 |
_c3629 _d3629 |
||