| 000 | 00378cam a22001214a 4500 | ||
|---|---|---|---|
| 008 | 100227s 000 0 eng | ||
| 010 | _a 2009275951 | ||
| 020 | _a 9781596932463 | ||
| 035 | _a(Sirsi) u3953 | ||
| 082 | 0 | 4 |
_a 621.381 _2 22 |
| 245 | 0 | 0 |
_a Integrated interconnect technologies for 3D nanoelectronic systems / _c Muhannad S. Bakir, James D. Meindl, editors. |
| 596 | _a1 | ||
| 999 |
_c2935 _d2935 |
||