| 000 | 01280cam a22003014a 4500 | ||
|---|---|---|---|
| 008 | 080323s2006 njua b 001 0 eng | ||
| 010 | _a2005028448 | ||
| 020 | _a9780471784067 | ||
| 020 | _a0471784060 | ||
| 035 | _a(Sirsi) u259 | ||
| 040 |
_aEG-CaNU _cEG-CaNU _dEG-CaNU |
||
| 042 | _ancode | ||
| 082 | 0 | 0 |
_a621.38152 _2 22 |
| 100 | 1 |
_aMay, Gary S. _94907 |
|
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _c Gary S. May, Costas J. Spanos. |
| 260 |
_a[Piscataway] : _b IEEE ; _a Hoboken, N.J. : _b Wiley-Interscience, _c c2006. |
||
| 300 |
_axix, 463 p. : _b ill. ; _c 25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 630 | 0 | 0 |
_aElectronics. _94908 |
| 650 | 0 |
_aIntegrated circuits _x Design and construction. _94909 |
|
| 650 | 0 |
_aProcess control _x Statistical methods. _9213 |
|
| 650 | 0 |
_aSemiconductors _x Design and construction. _94910 |
|
| 700 | 1 |
_aSpanos, Costas J. _94911 |
|
| 596 | _a1 | ||
| 999 |
_c1716 _d1716 |
||