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Semiconductor manufacturing technology / Chue San Yoo.

By: Material type: TextTextSeries: Advanced series in electrical and computer engineering ; v. 13Publication details: Hackensack, N.J. ; London : World Scientific, c2008.Description: xii, 470 p. : ill. ; 24 cmISBN:
  • 9789812568236
Subject(s): DDC classification:
  • 621.38152   22
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Main library General Stacks 621.38152 / YO.S 2008 (Browse shelf(Opens below)) 1 Available 000958
Books Books Main library General Stacks 621.38152 / YO.S 2008 (Browse shelf(Opens below)) 2 Available 004392

Includes bibliographical references and index.

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