TY  - BOOK
AU  - Ahmed Wasim Ibrahim Elsaid
TI  - DUV and EUV Photo-Lithography Solutions For The 7nm Technology
U1  - 621 
PY  - 2015///
KW  - MSD
KW  - NULIB
KW  - Dissertation, Academic
N1  - Thesis (M.A.)—Nile University, Egypt, 2015; "Includes bibliographical references"; Contents
N2  - Abstract
ER  -