TY  - BOOK
AU  - Campanella,Humberto
TI  - Acoustic wave and electromechanical resonators : :  concept to key applications / 
SN  - 9781607839774
U1  - 621.381   22
PY  - 2010///
CY  - Norwood, MA. : 
PB  -  Artech House, 
KW  - Acoustic surface wave devices
KW  - Electric resonators
N1  - Includes index; 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies
ER  -