Campanella, Humberto. <br/><br/>
Acoustic wave and electromechanical resonators :    concept to key applications /  
 Acoustic wave & electromechanical resonators 
Humberto Campanella. 
 - Norwood, MA. :    Artech House,    c2010. 
 - xv, 345 p. :    ill. ;    26 cm. 
<br/><br/> Includes index. 
<br/><br/>1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies. 
<br/><br/><label>ISBN: </label>9781607839774 1607839776 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Acoustic surface wave devices.<br/>Electric resonators.
<br/><br/><label>Dewey Class. No.: </label>621.381