TY  - BOOK
AU  -  Garrou,Philip E.
TI  -  Handbook of 3D integration : :  technology and applications of 3D integrated circuits / 
SN  -  9783527320349 (set)
U1  -  621.3815   22
KW  - Integrated circuits
KW  - Design and construction
KW  - Semiconductor wafers
KW  - Three-dimensional imaging
ER  -