TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas J.
TI  - Fundamentals of semiconductor manufacturing and process control / 
SN  - 9780471784067
U1  - 621.38152   22
PY  - 2006///
CY  - [Piscataway] : ,  Hoboken, N.J. : 
PB  -  IEEE ; ,  Wiley-Interscience, 
KW  - Electronics
KW  - Integrated circuits
KW  -  Design and construction
KW  - Process control
KW  -  Statistical methods
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -