May, Gary S. <br/><br/>
Fundamentals of semiconductor manufacturing and process control /  
Gary S. May, Costas J. Spanos. 
 - [Piscataway] :    Hoboken, N.J. :    IEEE ;    Wiley-Interscience,    c2006. 
 - xix, 463 p. :    ill. ;    25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780471784067 0471784060 
<br/><br/><label>LCCN: </label>2005028448 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Electronics.
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits -- Design and construction.<br/>Process control -- Statistical methods.<br/>Semiconductors -- Design and construction.
<br/><br/><label>Dewey Class. No.: </label>621.38152