TY  - BOOK
AU  - K?hler,Michael
AU  - Fritzsche,Wolfgang
TI  - Nanotechnology : :  an introduction to nanostructuring techniques / 
SN  - 9783527318711
U1  - 620.5   22
PY  - 2007///
CY  - Weinheim : 
PB  -  Wiley-VCH Verlag GmbH, 
KW  - MOT
KW  - CIT
KW  - Nanotechnology
N1  - Includes bibliographical references (p. 283-305) and index
ER  -