TY  - BOOK
AU  - Bakir,Muhannad S.
AU  - Meindl,James D.
TI  - Integrated interconnect technologies for 3D nanoelectronic systems / 
T2  - Integrated microsystems series
SN  - 1596932465
U1  - 621.381   22
PY  - 2009///
CY  - Boston, Mass. ; ,  London : 
PB  -  Artech House, 
KW  - Interconnects (Integrated circuit technology)
KW  - Telecommunication systems
KW  - Nanoelectronics
N1  - Includes bibliographical references and index
ER  -