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Acoustic wave and electromechanical resonators : concept to key applications / Humberto Campanella.

By: Material type: TextTextPublication details: Norwood, MA. : Artech House, c2010.Description: xv, 345 p. : ill. ; 26 cmISBN:
  • 9781607839774
  • 1607839776
Other title:
  • Acoustic wave & electromechanical resonators
Subject(s): DDC classification:
  • 621.381   22
Contents:
1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Books Books Main library General Stacks 621.381 / CA.A 2010 (Browse shelf(Opens below)) 1 Available 011830

Includes index.

1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.

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